Devoted to reports of original research, review articles, and Critical Review articles. JVST A includes topics such as applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.
Provides a vehicle for the publication of research dealing with microelectronics and nanometer structures.
Typical papers cover new developments in vacuum pumping and instrumentation, vacuum measurement, kinetic theory, gas-surface interactions, surface analysis, plasma and ion-surface interactions and etching, nanometer-scale processing, ion implantation, surface modification and coating industry, PVD, CVD and ion/plasma-assisted PVD/CVD.
Excellent web-site with more than 30 free online articles with the "How's" and "Whys" to use and understand vacuum. Good for beginners and advanced users.
Science /
Physics /
Publications
|